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Within the arsenal of surface analytical techniques surface analysis by low-energy ion scattering has become a well established method due to its particular features. This report first gives a brief introduction to the basic principles of the method and the relevant physical processes that provide the possibility to identify the atomic species present on the outermost atomic layer of a surface. In the subsequent sections the problem of quantification is considered and surface composition analysis of supported oxide catalysts and metallic alloys is discussed. In the final section the principles for obtaining structural information by ion scattering are introduced and applications to surface reconstruction, the structure of ordered adsorbates and thin film growth are presented. The related technique of direct recoil spectroscopy offers the possibility to detect atomic species with low masses such as hydrogen isotopes. The potential of the method for these various analytical problems is demonstrated by showing a number of typical results.

Additional information

Authors: TAGLAUER E, Max-Planck-Institut für Plasmaphysik, Garching bei München (DE)
Bibliographic Reference: Article: Journal of Surface Analysis, Vol. 3 (1997) No. 2, pp. 252-258
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