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  • Characterization of the temperature dependent phase transition of evaporated Ti films on diamond: Phase identification using maximum entropy data analysis

Abstract

The carbidization of thin Ti films on natural diamond has been investigated in the temperature range between room temperature and 700 C using x-ray-photoelectron-spectroscopy. It is possible to separate chemical phases in Ti 2p(3/2) electron peaks after deconvolution of the spectrometer's broadening function. Bayesian information has been employed, using maximum entropy prior information. The apparatus function is derived from measured spectra of the Fermi edge of a silver sample. Data analysis of reconstructed Ti 2p(3/2) core level spectra shows that, with increasing temperature, Ti films are transformed from metallic Ti to a mixed phase consisting og metallic Ti and TiC(0.56). No carbidic phase is found with a ratio of carbidic C to Ti smaller than 0.56. The metallic layer is fully transformed to TiC(0.56) at 430 C. At higher temperatures, the concentration ratio of carbidic C to Ti depends nearly linearly on temperature.

Additional information

Authors: MILLER S, Max-Planck-Institut für Plasmaphysik, Garching bei München (DE);FISCHER R, Max-Planck-Institut für Plasmaphysik, Garching bei München (DE);PLANK H, Max-Planck-Institut für Plasmaphysik, Garching bei München (DE);ROTH J, Max-Planck-Institut für Plasmaphysik, Garching bei München (DE);DOSE V, Max-Planck-Institut für Plasmaphysik, Garching bei München (DE)
Bibliographic Reference: Article: Journal of Applied Physics, Vol. 82 (1997) No. 7, pp 3314-3320
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