Colloidal behaviour of powder production in reactive RF plasmas
Formation of nanometer sized powder is often observed in reactive plasmas as used in various industrial applications. The particle formation in such plasmas has been investigated from the initial molecular precursors up to the final nanometer sized particles. The nature and role of the powder precursors, the agglomeration phase and the powder dynamics in silane and hexamethyldisiloxane plasmas was discussed. The similarity of powder formation in reactive plasmas to colloids was demonstrated using the example of plasma produced silicon and silicon dioxide particles.
Bibliographic Reference: Article: Proceedings of Frühjahrstagung 1998 der Schweizerische Physikalischen Gesellschaft (1998)
Record Number: 199810540 / Last updated on: 1998-05-05
Original language: en
Available languages: en