Community Research and Development Information Service - CORDIS


Optical interferometric metrology techniques are being increasingly used in industry. These techniques assure a greater accuracy in measuring displacements caused by deformations. One such technique, electronic speckle pattern interferometry (ESPI), has been used successfully to measure in-plane deformations. This study has led to an improved 3-dimensional geometric model, allowing assessment both qualitatively and quantitatively of what is actually measured throughout all the inspected surface. Calculations with practical parameters taken from a real ESPI instrument designed at the Joint Research Centre of Ispra (Italy) were carried out. The results showing three-dimensional diagrams of the error measurements are presented and discussed.

Additional information

Authors: ALBRECHT D, JRC Ispra (IT)
Bibliographic Reference: Article: Optics and Laser in Engineering (1998)
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