Estimation of the 2D measurement error introduced by out-of-plane ESPI instruments
Optical interferometric metrology techniques are being increasingly used in industry. These techniques assure a greater accuracy in measuring displacements caused by deformations. One such technique, electronic speckle pattern interferometry (ESPI), has been used successfully to measure out-of-plane deformations. This study has led to an improved 3-dimensional geometric model, allowing assessment both qualitatively and quantitatively of what is actually measured throughout all the inspected surface. Calculations with practical parameters taken from a real ESPI instrument designed at the Joint Research Centre of Ispra (Italy) were carried out. The results showing 3-dimensional diagrams of the error measurements are presented and discussed.
Bibliographic Reference: Article: Optics and Laser in Engineering
Record Number: 199810743 / Last updated on: 1998-06-22
Original language: en
Available languages: en