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Abstract

This paper reports the study of the structure and properties of the ternary alloy a-B(1-x)C(x):H. For this purpose, a-B(1-x)C(x):H films were deposited by radio-frequency plasma chemical vapour deposition (RF-PCVD) over the whole range of compositions from pure a-B:H to pure a-C:H. The film composition was determined by ion-beam analysis (IBA). Fourier transform infrared (FTIR) spectroscopy was applied to investigate the film structure in general and especially the question how hydrogen is bonded to the different boron and carbon sites. Furthermore, vibrations of the B-C network were the object of investigations.

Additional information

Authors: ANNEN A, Max-Planck-Institut für Plasmaphysik, Garching bei München (DE);SAß M, Max-Planck-Institut für Plasmaphysik, Garching bei München (DE);BECKMANN R, Max-Planck-Institut für Plasmaphysik, Garching bei München (DE);VON KEUDELL A, Max-Planck-Institut für Plasmaphysik, Garching bei München (DE);JACOB W, Max-Planck-Institut für Plasmaphysik, Garching bei München (DE);SA? M, Max-Planck-Institut fur Plasmaphysik, Garching bei Munchen (DE)
Bibliographic Reference: Article: Thin Solid Films, Vol. 312 (1998) pp. 147-155
Record Number: 199810991 / Last updated on: 1998-09-15
Category: PUBLICATION
Original language: en
Available languages: en
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