Influence of surface roughness on measuring depth profiles and the total amount of implanted ions by RBS and ERDA
For rough surfaces depth profiling of surface layers becomes questionable if the layers to be analysed have a thickness comparable to or larger than the dimension of the surface roughness. In this work nitrogen ions have been implanted at normal incidence into carbon samples with smooth and rough surfaces, respectively. These implanted layers have been measured by Rutherford backscattering spectrometry (RBS) using 1.7 MeV(4)He ions and by elastic recoil detection analysis (ERDA) using 35 MeV(35)Cl ions at different angles of incidence. Computer simulations using an idealized surface topography to model surface-roughness effects give qualitative agreement with the ERDA depth profiles obtained from the rough sample.
Bibliographic Reference: Article: Nuclear Instruments and Methods in Physics Research B, Vol. 136-138 (1998) pp. 628-632
Record Number: 199810996 / Last updated on: 1998-09-15
Original language: en
Available languages: en