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Abstract

In experiments with MeV ion beams the energy resolution of the detector and the energy spread of the incident ion beam restricts the energy and depth resolution. The deconvolution of the measured spectra with the energy transfer function is an ill-posed problem which is tackled consistently by the Bayesian probability theory. Along with the entropic prior and the adaptive kernel method the most non-committal energy distribution compatible with the measured data has been determined together with its confidence interval. An enhancement of the resolution by a factor of 6 in Rutherford backscattering analysis of thin films, resulting in an energy resolution of about 3 keV with semiconductor detectors, is obtained. The uncertainty of the transfer function is considered properly. The deconvolution allows the separation of the isotopes of Cu and Fe. The resolution enhancement of depth effects of energy losses straggling and multiple scattering is demonstrated for a Co-Au multi-layer film.

Additional information

Authors: FISCHER R, Max-Planck-Institut für Plasmaphysik, Garching bei München (DE);MAYER M, Max-Planck-Institut für Plasmaphysik, Garching bei München (DE);VON DER LINDEN W, Max-Planck-Institut für Plasmaphysik, Garching bei München (DE);DOSE V, Max-Planck-Institut für Plasmaphysik, Garching bei München (DE)
Bibliographic Reference: Article: Nuclear Instruments and Methods in Physics Research B, Vol. 136-138 (1998) pp. 1140-1145
Record Number: 199810997 / Last updated on: 1998-09-15
Category: PUBLICATION
Original language: en
Available languages: en