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The composition of intermixed layers on Be containing H, D, Be, C and O has been analysed using conventional 4(He) Rutherford backscattering (RBS) at 2.2 MeV together with 2.5 MeV 4(He) elastic recoil detection (ERD) for hydrogen isotope analysis. The results are compared with heavy ion ERD using 12 MeV to 40 MeV Si incident ions and detection of recoils without mass separation. For the analysis of the RBS and ERD data the newly developed spectra simulation program SIMNRA has been used. The advantages and disadvantages of both methods in respect to depth resolution, data analysis and radiation damage are discussed.

Additional information

Authors: ROTH J, Max-Planck-Institut für Plasmaphysik, Garching bei München (DE);MAYER M, Max-Planck-Institut für Plasmaphysik, Garching bei München (DE);WALSH D S, Sandia National Laboratories, Albuquerque (US);WAMPLER W R, Sandia National Laboratories, Albuquerque (US)
Bibliographic Reference: Article: Nuclear Instruments and Methods in Physics Research B, Vol. 136-138 (1998), pp. 689-694
Record Number: 199811033 / Last updated on: 1998-09-15
Original language: en
Available languages: en