Ion beam analysis of oxidised a-C:D layers on Be: A comparison of (4)He RBS and (28)Si ERD analysis
The composition of intermixed layers on Be containing H, D, Be, C and O has been analysed using conventional 4(He) Rutherford backscattering (RBS) at 2.2 MeV together with 2.5 MeV 4(He) elastic recoil detection (ERD) for hydrogen isotope analysis. The results are compared with heavy ion ERD using 12 MeV to 40 MeV Si incident ions and detection of recoils without mass separation. For the analysis of the RBS and ERD data the newly developed spectra simulation program SIMNRA has been used. The advantages and disadvantages of both methods in respect to depth resolution, data analysis and radiation damage are discussed.
Bibliographic Reference: Article: Nuclear Instruments and Methods in Physics Research B, Vol. 136-138 (1998), pp. 689-694
Record Number: 199811033 / Last updated on: 1998-09-15
Original language: en
Available languages: en