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The gas response of tin oxide sensors strongly depends on the preparation process and especially on deposition parameters. For this reason, sensor elements have been prepared by depositing nanocrystalline tin oxide at room temperature and at 250 C on polycrystalline alumina substrates by a reactive sputtering technique. It is seen that the response to gases is dependent on the tin oxide deposition temperature due to the structure change undergone by the oxide. The best response to low concentrations of carbon monoxide and propanal is given by tin oxide sensors deposited at 250 C. Microstructural examination of these devices has been carried out using transmission electron microscopy. The main difference observed in the tin oxide microstructure is the porosity. Sensors prepared at 250 C had a more compact microstructure.

Additional information

Authors: HORRILLO M C, Laboratorio de Sensores-IFA-CSIC, Madrid (ES);GUTIÉRREZ J, Laboratorio de Sensores-IFA-CSIC, Madrid (ES);SERVENTI A, JRC Ispra (IT);RICKERBY D, JRC Ispra (IT)
Bibliographic Reference: Paper presented: Eurosensors XII, Southampton (GB), September 13-16, 1998
Availability: Available from (1) as Paper EN 41682 ORA
Record Number: 199811239 / Last updated on: 1998-10-27
Original language: en
Available languages: en
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