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Abstract

This paper presents a method to exploit the external electrical characteristics of RF generator allowing to determine plasma characteristics.

The method is found on the determination of the ICP source equivalent circuit, related to impedance measurements. A novel equivalent circuit has been established using method based on impedence measurements versus the frequency in simulating the plasma by a dummy load. The electrical modelling results have been compared to impedence measurements with a good agreement. The electrical conductively profiles agreed the ion current density profile certifying the reliability of the equivalent circuit and providing the relation between internal plasma characteristics to electrical parameters. .

Additional information

Authors: COLPO P, Institute for Advanced Materials, Surface Engineering Unit;ROSSI F, Institute for Advanced Materials, Surface Engineering Unit;ERNST R, EPM-Madylam, Saint Martin d'Heres (FR)
Bibliographic Reference: Article: Journal of Applied Physics,1998
Record Number: 199910273 / Last updated on: 1999-03-12
Category: PUBLICATION
Original language: en
Available languages: en