Determination of the Absolute CH(3) radical Flux Emanating from a Methane Electron Cyclotron Resonance Plasma
Methyl radicals from a methane electron cyclotron resonance plasma are measured quantitatively at the sample position by ionization threshold mass spectrometry (ITMS). The absolute fluxes are determined by calibrating the CH(3) ITMS results with those of methane, taking into account the published energy-dependent cross sections for the ionization of CH(3) and CH(4), respectively. The measured CH(3) radical fluxes are on the order of some 10(15)cm(-2)s(-1), which is in accordance with recent modeling results.
Bibliographic Reference: Article: Applied Physics Letters, 73 (1998) 1, 31-33
Record Number: 199910408 / Last updated on: 1999-03-19
Original language: en
Available languages: en