Depth of Origin of Spluttetred Atoms for Elemental targets
The mean depth of origin of spluttered atoms is an important characteristic of the spluttering process. There exist several theoretical and experimental deteminations of the escape depth with different results. To clear up the situation, in the present work a systematic computer simulation study of mean depth of origin of spluttered atoms is performed.
Bibliographic Reference: Article: Nuclear Instruments and Methods in Physics Research B, 145(1998), 492-502
Record Number: 199910478 / Last updated on: 1999-03-19
Original language: en
Available languages: en