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Laser-induced formation of sub-micrometer dust particles and the subsequent coalescence phenomena in a low-pressure methane radio frequency plasma have been analyzed. Six distinct phases can be distinguished: a) nanoparticle synthesis by laser interaction with the plasma species, b) particle conglomeration and the formation of ordered Coulomb lattices at the plasma-sheath region above the powered electrode, c) coalescence of grains within the Coulomb lattice and formation of sub-millimeter strings. D0 condensation of the strings in the discharge and the formation of V-shaped structures, e) condensation of the V structures into a single network of several centimeters in diameter, suspended in plasma, f) deposition of the network on the on the electrode and its subsequent growth on the surface. Large carbon structures as well as nanoparticles have been analyzed in situ by He-Ne laser light scattering and laser ablation and ex situ by an optical and scanning electron microscope, and by micro-raman spectroscopy.

Additional information

Authors: FRANCOIS R, IHCP, JRC Ispra (IT);GIACOMO C, IHCP, JRC Ispra (IT);STOFFELS W, Eindhoven Universityof Technology (DE);STOFFELS E, Eindhoven Universityof Technology (DE)
Bibliographic Reference: Article: Journal of Vacuum Science and Technology, 1998
Record Number: 199910693 / Last updated on: 1999-05-08
Original language: en
Available languages: en
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