MoS(2) nanoparticle formation in a low pressure environment
of MoS(2) nanoparticles atpressures between 0.5 and 10 Torr has been studied. Two different chemistries for the particle nucleation are compared: one based on MoCl and H(2)S and the other based on MoCl(2) and S. In both cases particle formation has been studied in a thermal oven and in a radio frequency production. At pressures below 10 Torr na particle production in the oven is achieved in H(2)S chemistry. In the more reactive chemistry based on sulfur, the optimal conditions for thermal particle growth are found at 100 Torr and low gas flows using excess of hydrogen. In the radio-frequency discharge, nanoparticles are readily formed in both chemistries at 0.5 Torr and can be detected in situ by laser light scattering. In the H(2)S chemistry particlessmaller than 100 nm diameter have been synthesized, the sulfur chemistry yields somewhat larger grains. Both in thermal and plasma-enhanced particle syntheses, using the excess of hydrogen is beneficial for the stability and purity of the particles.
Bibliographic Reference: Article: Journal of Applied Physics (1998)
Record Number: 199910694 / Last updated on: 1999-05-08
Original language: en
Available languages: en