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Abstract

After a brief outline of the various techniques for carbon-based coatings i.e. DC-, RF- and microwave-driven plasma discharges-the growth mechanisms of polymer-like and diamond-like carbon (DLC) films, also known as amorphous carbon films, are discussed according to most recent experimental observations. Thereafter mechanical and optical properties of C-H films and resulting practical applications will be summarized.

Additional information

Authors: WILHELM R, Max-Planck-Institut für Plasmaphysik, Garching (DE)
Bibliographic Reference: Article; Advanced Technologies Based on Wave and Beam Generated Plasmas, (1999), 123-135
Record Number: 199910804 / Last updated on: 1999-06-07
Category: PUBLICATION
Original language: en
Available languages: en