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Abstract

A new simulation program for Rutherford backscattering spectroscopy (RBS) together woth an adaptive kernal method in the Bayesian probability theory framework was applied to the analysis of RBS data. Reconstructed depth profiles are free from noise-induced ringing, even for strongly overlapping RBS peaks. This has been achieved by the use of the adaptive kernal method, which generates the least informative depth profile according to the data and in addition allows one to calculate the uncertainty of the obtained depth profiles. The method is applied to erosion measurements of carbon samples.

Additional information

Authors: TOUSSAINT U, Max-Planck-Institut fur Plasmaphysik, Garching bei Munchen (DE);FISCHER R, Max-Planck-Institut fur Plasmaphysik, Garching bei Munchen (DE);KRIEGER K, Max-Planck-Institut fur Plasmaphysik, Garching bei Munchen (DE);DOSE V, Max-Planck-Institut fur Plasmaphysik, Garching bei Munchen (DE)
Bibliographic Reference: Article: New Journal of Physics , 1(1999)11
Record Number: 199910852 / Last updated on: 1999-06-18
Category: PUBLICATION
Original language: en
Available languages: en