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Abstract

Rutherford backscattering spectra have been calculated with a parallel version of TRIM.SP for 0.5 and 1 MeV he normally on a target consisting of about 100nm Au and Si. The calculated energy distributions are compared with experimental distributions and with those calculated with SIMNRA including double scattering. The contributions of plural scattering on the distributions are determined.

Additional information

Authors: ECKSTEIN W, ;MAYER M,
Bibliographic Reference: Article: Nuclear Instruments and Methods in Physics Research B, 153 (1999), 337-344
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