Dependence of energy distributions of sputtered and reflected atoms on incident fluence
The energy distributions of sputtered and reflected atoms from a target consisting of equal parts of Cu and W are determined with the dynamic Monte Carlo program TRIDYN versus the fluence of incident Ar. TRIDYN is adjusted for the use on a parallel computer. The distributions are reconstructed from their stored moments with the maximum entropy method.
Bibliographic Reference: Article: Nuclear Instruments and Methods in Physics Research B, 153 (1999), 345-349
Record Number: 199911122 / Last updated on: 1999-08-06
Original language: en
Available languages: en