Community Research and Development Information Service - CORDIS


In order to determine the beam spot size and the linear or raster scanning properties of microprobe analytical systems, a novel reference material has been developed by IRMM, consisting of permalloy strip patterns of different widths on a silicon substrate. The general layout of this micro-structured reference material with pattern sizes ranging from 2um to100um, fabricated with production schemes of microelectronics circuitry on silicon wafers, is discussed. The large size range of the individual pattern structures makes the material equally applicable to very fine and less focused microbeams. Due to the choice of substrate and pattern materials, these samples exhibit a high elemental contrast suitable for analysis with X-ray and electron detection and with ion scattering techniques.

Prototype chips of this material were investigated with high-energy ion microprobes and with both X-ray tube based as well as synchrotron radiation based X-ray microprobes and capillary optics. Efficient experimental routines for focusing the ion beams and for determining unequivocally the spot size of all kinds of microbeams with the help of this material are described. Due to the very good definition of the metal lines and their edge profiles line scan results of XRF, PIXE or RBS analysis can be directly converted to the spot size and microbeam profile. Examples from our measurements with the different microprobe systems are given.

Furthermore, the microscopic structure of these samples allows the geometric dependence of matrix effects in the production of X-rays to be studied in detail. TO this end - and far beyond its primary purpose - this reference material turns out to be a very valuable tool in ensuring the correct interpretation of micro-distribution analytical measurements nts

Additional information

Authors: WATJEN U, IRMM, JRC-Geel (GB);BARSONY I, Hungarian Academy of Sciences, Budapest (HU);DUCSO C, Hungarian Academy of Sciences, Budapest (HU)
Bibliographic Reference: Paper presented: EMAS 99, Konstanz (DE), 3-7th May (1999)
Availability: Available free of charge from CCR Ispra (IT)
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