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  • Surface loss probabilities of hydrocarbon radicals on amorphous hydrogenated carbon film surfaces: Consequences for the formation of re-deposited layers of fusion experiments

Abstract

The surface probabilities of hydrocarbon radicals on the surface of amorphous hydrogenated carbon films are investigated by depositing films inside a cavity with walls made from silicon substrates. This cavity is exposed to a discharge using different hydrocarbon and source gases, and particles from the plasma can enter the cavity through a slit. The surface loss probability beta is determined by analysis of the deposition profile inside the cavity. The surface loss probability corresponds to the sum of the probabilities of effective sticking on the surface and of formation of a non-reactive volatile product via surface reactions.

Additional information

Authors: KEUDELL A, Max-Planck-Institut fur Plasmaphysik, Garching bei Munchen (DE);HOPF C, Max-Planck-Institut fur Plasmaphysik, Garching bei Munchen (DE);SCWARZ-SELINGER T, Max-Planck-Institut fur Plasmaphysik, Garching bei Munchen (DE);JACOB W, Max-Planck-Institut fur Plasmaphysik, Garching bei Munchen (DE)
Bibliographic Reference: Article: Nuclear Fusion, 39 (1999)10, 1451-1462
Record Number: 199911618 / Last updated on: 1999-11-20
Category: PUBLICATION
Original language: en
Available languages: en
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