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Abstract

Depth profiling of light elements in the surface layer of solids by means of ERDA is limited to depths smaller than about 1 um. In order to measure the distributions of hydrogen isotopes in in larger depth regions such as needed for the divertor tiles from the tokamak fusion experiment ASDEX-Upgrade in the Max-Planck-Institut fur Plasmaphysik, samples cut from the divertor tiles were bevelled at different angles by mechanical cutting and polishing or by ion beam slope cutting. The mechanically cut slopes were additionally cleaned and polished by oblique incidence ion beam slope cutting. The mechanically cut slopes were additionally cleaned and polished by oblique incidence ion beam spluttering with target rotation to avoid anisotropic etching.

Additional information

Authors: BEHRISCH R, Max-Planck-Institut fur Plasmaphysik, Garching bei Munchen (DE)
Bibliographic Reference: Article: Nuclear Instruments and Methods in Physics Research, B158 (1999), 647-652
Record Number: 199911619 / Last updated on: 1999-11-20
Category: PUBLICATION
Original language: en
Available languages: en