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  • Determination of main and minor components of silicon based materials by a combustion with elemental fluorine, separation of gaseous fluorination products by a carrier gas distillation and gas mass spectrometry.


For the determination of main and minor components in silicon based ceramic powders the decomposition by a combustion with elemental fluorine and the pre-separation of volatile fluorination products by a carrier-gas-distillation with a subsequent detection by quadruple mass spectrometry is described. The necessity and success of the pre-separation step is demonstrated for the determination of boron as a minor constituent in SiC, where the spectral influences of silicon on the boron signals could be decreased significantly. The method developed is shown to be directly applicable for the determination of silicon. The determination of nitrogen in Si3N4 requires additional effort to separate nitrogen from the excess of fluorine.

Additional information

Authors: IRMM, ;JRC-GEEL (BE),
Bibliographic Reference: Article: Analytical Chemistry (1999)
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