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Abstract

The depth of origin of sputtered atoms is investigated for tungsten carbide as an example of a compound with two species of large difference in mass. The results are compared with those for the elemental species C and W. This work is an extension of our previous work on elemental targets. The Monte Carlo program TRIM.SP is applied to calculate the distribution of depth of origin and the dependencies of the mean depth of origin on the projectile energy, E, the angle of incidence, "a", and the target atomic species, for the bombardment with Ar in the energy range 0.1-100 keV. In addition, the change of the depth of origin distributions with bombarding fluence is studied with the dynamic Monte Carlo program TRIDYN.

Additional information

Authors: ECKSTEIN W, Max-Planck Institut f³r Plasmaphysik, Garching bei M³nchen (DE);SHULGA V I, Institute of Nuclear Physics, Moscow State University, Moscow (RU)
Bibliographic Reference: Article: Nuclear Instruments and Methods in Physics Research B 164-165 (2000) pp. 748-754
Availability: Nuclear Instruments and Methods in Physics Research (Journal)
Record Number: 200012116 / Last updated on: 2000-07-12
Category: PUBLICATION
Original language: en
Available languages: en
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