Structural and Dimensional Control in Micromachined Integrated Solid State Gas Sensors
The application of electron microscopy for quality control in the fabrication of solid state integrated tin oxide gas sensors is described. Among the parameters that influence the reproducibility and mechanical stability of these devices are the thickness, grain size, porosity and point defect (oxygen vacancy) distribution of the active SnO2 layer and the intrinsic stresses and interfacial adhesion in the support layers.
Bibliographic Reference: Article: Sensors and Actuators, further details unavailable
Availability: Sensors and Actuators (Journal)
Record Number: 200012152 / Last updated on: 2000-08-10
Original language: en
Available languages: en