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Abstract

The absolute amount of deuterium in amorphous deuterated carbon (a-C:D) layers has been measured by six laboratories with different techniques, such as MeV ion beam analysis, secondary ion mass spectrometry (SIMS), and thermal desorption spectrometry (TDS). The a-C:D layers have been deposited from a CD4 glow discharge plasma onto carbon and silicon substrates. The results for the absolute numbers obtained with the different analysing techniques show a scatter of up to about 35% around the average value. These deviations are larger than the errors stated by the experimentalists and indicate possible systematic uncertainties in some of the measurements.

Additional information

Authors: BEHRISCH ET AL, Max-Planck-Institut fur Plasmaphysic, Garching (DE);ASSMANN W, Sektion Physik, L-M Universitat, Munchen, Garching (DE);DOLLINGER G ET AL, Physik Department E12, Techniche Universitat Munchen, Garching (DE);KREISSIG U ET AL, Institut fur Ionenstrahlphzsik und Materialforschung, Rossendorf, Dresden (DE);HILDERBRANDT D ET AL, Institut fur Experimentelle Physik, Otto-von-Guericke-Universitat Magdenburg (DE);SCHLEU?NER D ET AL, ;EDELMANN C,
Bibliographic Reference: Article: Journal of Nuclear Materials, vol. 281 (2000), pp. 42-56
Record Number: 200012934 / Last updated on: 2000-12-18
Category: PUBLICATION
Original language: en
Available languages: en