A study of nanocrystal formation after Sb implantation into SiO2 - observation of antimony oxides
Antimony crystals were formed in thin SiO2 films using low-energy ion implantation of Sb followed by annealing. Using Fourier Transform Laser Microprobe Mass Spectrometry (FT LMMS), we observe for the first time the presence of antimony oxide in the intermediate phase (as-implanted layer of Sb) by means of signals referring to the intact Sb203 molecules. In annealed samples no adduct ions of Sb203 could be detected, only SbO+ fragments. The size and the distribution of the nano-crystals formed around the initial depth of implantation are studied in the as-implanted samples by High-Resolution Electron Microscopy (HREM). The crystalline structure of these nano-crystals is also studied and the presence of antimony trioxide Sb203 in the form of valentinite is proven. After the annealing step, the implanted material has spread into a wider band. The method introduced here, based on combining TEM and FT LMMS results, offers the possibility of studying the evolution of the phases in Sb nano-crystal formation.
Bibliographic Reference: An oral report given at: 7th European Workshop on Modern Developments and Applications in Microbeam Analysis. Organised by: European Microbeam Analysis Society. Held at: Tampere (FI), 6-10 May 2001
Record Number: 200214304 / Last updated on: 2002-01-30
Original language: en
Available languages: en