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The influence of surface roughness on Rutherford backscattering spectroscopy (RBS) spectra has been studied experimentally and by computer simulation with the SIMNRA code. Rough thin films are described by a distribution of film thicknesses, while rough substrates are approximated by a distribution of local inclination angles. Correlation effects of surface roughness are neglected. Rough film effects can be calculated for RBS including non-Rutherford scattering, nuclear reaction analysis and elastic recoil detection analysis. The results of simulation calculations show good agreement with experimental data. For thin films of high Z elements on rough substrates additionally plural scattering plays an important role.

Additional information

Authors: MAYER M, Max-Planck-Institut für Plasmaphysik, EURATOM Association, Garching (DE)
Bibliographic Reference: An article published in: Nuclear Instruments and Methods in Physics Research - Section B, Volume 194, Issue 2, August 2002, Pages 177-186
Availability: This article can be accessed online by subscribers, and can be ordered online by non-subscribers, by http://10.1016/S0168-583X%2802%2900689-4 (clicking here).
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