Modeling of hydrocarbon species in ECR methane plasmas
ECR methane laboratory plasmas are modelled using both a simple zero-dimensional particle balance model and a fully kinetic model. The kinetic model consists of a two-dimensional in space, three-dimensional in velocity space particle-in-cell model with Monte-Carlo collisions in which electrons, ions and neutrals are treated as particles, moving in self-consistent electric and external magnetic fields. The model results are discussed and compared with experimental data.
Bibliographic Reference: An article published in: Journal of Nuclear Materials, Volumes 313-316 , March 2003, Pages 434-438
Availability: This article can be accessed online by subscribers, and can be ordered online by non-subscribers, at: http://dx.doi.org/10.1016/S0022-3115%2802%2901410-1
Record Number: 200316222 / Last updated on: 2003-04-29
Original language: en
Available languages: en