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Abstract

New fit formulae for the energy and angular dependencies of the sputtering yield are proposed. Though they are empirical they give a better description of yield data, especially near the threshold for the energy dependence and at low mass ratios for the angular dependence. The new formula for the energy dependence was applied to determine threshold energies for different mass ratios.

Additional information

Authors: ECKSTEIN W, Centre for Interdisciplinary Plasma Science, Max-Planck-Institut für Plasmaphysik, EURATOM Association, Garching (DE);PREUSS R, Centre for Interdisciplinary Plasma Science, Max-Planck-Institut für Plasmaphysik, EURATOM Association, Garching (DE)
Bibliographic Reference: An article published in: Journal of Nuclear Materials Volume 320, Issue 3 , 1 August 2003, pp.209-213
Availability: This article can be accessed online by subscribers, and can be ordered online by non-subscribers, at: http://dx.doi.org/10.1016/S0022-3115%2803%2900192-2
Record Number: 200316586 / Last updated on: 2003-08-21
Category: PUBLICATION
Original language: en
Available languages: en
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