New fit formulae for the sputtering yield
New fit formulae for the energy and angular dependencies of the sputtering yield are proposed. Though they are empirical they give a better description of yield data, especially near the threshold for the energy dependence and at low mass ratios for the angular dependence. The new formula for the energy dependence was applied to determine threshold energies for different mass ratios.
Bibliographic Reference: An article published in: Journal of Nuclear Materials Volume 320, Issue 3 , 1 August 2003, pp.209-213
Availability: This article can be accessed online by subscribers, and can be ordered online by non-subscribers, at: http://dx.doi.org/10.1016/S0022-3115%2803%2900192-2
Record Number: 200316586 / Last updated on: 2003-08-21
Original language: en
Available languages: en