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Abstract

The interaction of CH3 and H with amorphous hydrocarbon surfaces plays a central role during plasma deposition of such films. Recently, this interaction has been explored in particle beam experiments. A rate equation model has been proposed which explains the experimental observations on the basis of elementary surface reactions. This model includes several parameters which have the meaning of either a reaction cross section or a rate constant. The predictive power of the model and its applicability to more complex hydrocarbon deposition processes hinges on a reliable determination of the model parameters. In this paper, we develop a Bayesian analysis of the data. The result of this analysis are estimation distributions for each parameter rather than single numbers. We use this in-depth information to draw valuable conclusions about the ability of the model to describe the surface reactions. We find strong indications for a dependence of the reaction cross sections on the particles' angle of incidence.

Additional information

Authors: MEIER M, Max-Planck-Institut für Plasmaphysik, IPP-EURATOM Association, Garching (DE);PREUSS R, Max-Planck-Institut für Plasmaphysik, IPP-EURATOM Association, Garching (DE);DOSE V, Max-Planck-Institut für Plasmaphysik, IPP-EURATOM Association, Garching (DE)
Bibliographic Reference: An article published in: New Journal of Physics 5 133 (2003)
Availability: This article can be accessed online by subscribers, and can be ordered online by non-subscribers, at: http://dx.doi.org/doi:10.1088/1367-2630/5/1/133
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