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Electron drift velocity in silane in strong electric fields determined from rf breakdown curves

Funded under: FP7-EURATOM

Abstract

We report measurements of the breakdown curves of an rf capacitive discharge in low pressure silane. The electron drift velocity was determined from the locations of the turning point and of the minimum in the breakdown curves in the range E/p = 145-1292 V cm{-1} Torr{-1}. We compare our results to values calculated from the published cross-sections in the range E/p = 1-2000 V cm{-1} Torr{-1} and data calculated in other papers and find good agreement.

Additional information

Authors: LISOVSKIY V, Department of Physics and Technology, Kharkov National University, Kharkov (UA);BOOTH J-P, Laboratoire de Physique et Technologie des Plasmas, Ecole Polytechnique, Palaiseau (FR);LANDRY K, Unaxis Displays Division France SAS, 5, Palaiseau (FR);DOUAI D, Département de Recherches sur la Fusion Contrôlée, Association Euratom-CEA sur la Fusion, CEA Cadarache, Saint-Paul-lez-Durance (FR);CASSAGNE V, Riber, Bezons (FR);YEGORENKOV V, Department of Physics, Kharkov National University, Kharkov (UA)
Bibliographic Reference: An article published in: Journal of Physics D: Applied Physics 40 (2007), pp. 3408-3410
Availability: This article can be accessed online by subscribers, and can be ordered online by non-subscribers, at: http://dx.doi.org/doi:10.1088/0022-3727/40/11/022
Record Number: 200719392 / Last updated on: 2007-09-11
Category: PUBLICATION
Original language: en
Available languages: en
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