Community Research and Development Information Service - CORDIS

Abstract

This paper reports the recorded breakdown curves for dual-frequency (27.12 MHz/2 MHz and 13.56 MHz/50 Hz) discharges in nitrogen. Applying the LF voltage shifts the RF breakdown curve to the region of higher voltages and gas pressures, which is associated with the increased loss of charged particles due to the drift in the LF field. At higher LF voltage amplitudes the LF field contributes to gas ionization, the breakdown voltage for the RF discharge decreases and approaches zero when a self-sustained discharge in the LF field ignites. Applying the RF voltage leads to the decrease in the breakdown LF voltage, possibly due to the decrease of electron losses because of the oscillations in the RF field.

Additional information

Authors: LISOVSKIY V, Department of Physics and Technology, Kharkov National University - Kharkov (UA);YEGORENKOV V, Department of Physics and Technology, Kharkov National University - Kharkov (UA);BOOTH J-P, Laboratoire de Physique et Technologie des Plasmas, Ecole Polytechnique, Palaiseau (FR);LANDRY K, Unaxis Displays Division France SAS, Palaiseau (FR);DOUAI D, Département de Recherches sur la Fusion Contrôlée, Association Euratom-CEA sur la Fusion, CEA Cadarache, Saint-Paul-lez-Durance (FR);CASSAGNE V, Riber, Bezons (FR)
Bibliographic Reference: An article published in: EPL80 25001(2007), 4 pp.
Availability: This article can be accessed online by subscribers, and can be ordered online by non-subscribers, at: http://dx.doi.org/10.1209/0295-5075/80/25001
Record Number: 200819679 / Last updated on: 2008-02-15
Category: PUBLICATION
Original language: en
Available languages: en