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This paper shows that the rf capacitive discharge in NF(3) and SiH(4) can burn in three possible modes: weak-current alpha-mode, strong-current gamma-mode and dissociative delta-mode. This new dissociative delta-mode is characterized by a high dissociation degree of gas molecules (actually up to 100% in NF(3) and up to 70% in SiH(4)), higher resistivity and a large discharge current. On increasing rf voltage first we may observe a weak-current alpha-mode (at low NF(3) pressure the alpha-mode is absent). At rather high rf voltage when a sufficiently large number of high energy electrons appear in the discharge, an intense dissociation of gas molecules via electron impact begins, and the discharge experiences a transition to the dissociative delta-mode. The dissociation products of NF(3) and SiH(4) molecules possess lower ionization potentials, and they form an easily ionized admixture to the main gas. At higher rf voltages when near-electrode sheaths are broken down, the discharge experiences a transition to the strong-current gamma-mode.

Additional information

Authors: LISOVSKIY V, Department of Physics and Technology, Kharkov National University, Kharkov (UA);BOOTH J-P, Laboratoire de Physique et de Technologie des Plasmas, CNRS École Polytechnique, Palaiseau (FR);LANDRY K: DOUAI D: CASSAGNE V, Unaxis Displays Division France SAS, Palaiseau (FR);YEGORENKOV V, Département de Recherches sur la Fusion Contrôlée, Association Euratom-CEA sur la Fusion, CEA Cadarache, Saint-Paul-lez-Durance (FR)
Bibliographic Reference: An article published in: Journal of Physics D: Applied Physics 40 6631-6640 (2007)
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