IMPROVED TARGET MATERIAL FOR HIGH-YIELD SPUTTERING DEPOSITION OF HIGH QUALITY ITO FILMS WITH LOW RESISTIVITY AND HIGH OPTICAL TRANSMISSION
Project ID: BRE20298Funded under: FP3-BRITE/EURAM 2
This document is a synthesis report from a research project carried out under the Industrial and Materials Technologies programme (BRITE/EURAM 2), 1990-1994. It has been submitted directly by the project's consortium. It details the results of the project and sketches the consortium's follow-up intentions. For more information on this project prior to down-loading the synthesis report, click on the hyperlinked project ref. number in the table below to go directly to the relevant record in the CORDIS Projects database.
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Record Number: 928 / Last updated on: 1997-12-09