Wspólnotowy Serwis Informacyjny Badan i Rozwoju - CORDIS

Chemical vapour deposition and thin film technology

AIXTRON offers complete technology in the field of chemical vapour deposition (CVD) thin film equipment, technology and processes. The technology includes III-V and II-VI semiconductor compound, carbide and nitride, diamond and oxide thin films.

All peripherals, such as gas supply, gas monitoring, exhaust treatment, precursor technology, are available.

Reported by

AIXTRON Semiconductor Technologies GmbH
52072 Aachen
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