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  • Periodic Reporting for period 1 - M3TERA (Micromachined terahertz systems -a new heterogeneous integration platform enabling the commercialization of the THz frequency spectrum)
H2020

M3TERA Report Summary

Project ID: 644039
Funded under: H2020-EU.2.1.1.1.

Periodic Reporting for period 1 - M3TERA (Micromachined terahertz systems -a new heterogeneous integration platform enabling the commercialization of the THz frequency spectrum)

Reporting period: 2015-02-01 to 2016-07-31

Summary of the context and overall objectives of the project

The main objective of the M3TERA project is to develop a novel microsystem platform which provides a new way for fabricating complex systems working at terahertz (THz) frequencies. The envisioned THz microsystems are very compact and of extremely low weight, are (high-) volume manufacturable with high product uniformity, and thus are of low cost as compared to conventional ways of manufacturing THz systems. They contain integrated active circuits and micro-electromechanically reconfigurable circuit elements such as tuneable filters. This technology envisions a true break-through in THz technology, which could finally enable a wide-spread utilization of THz technology in society. As implementation demonstrators, the project focuses primarily on a telecom demonstrator for a beyond-100 GHz high speed communication link, and secondary on sensing applications.

Work performed from the beginning of the project to the end of the period covered by the report and main results achieved so far

The main technical achievements in the first period of the project are: completion of specifications, design kit, microsystem concept, antenna and sensor interfaces, and concept studies of interfaces between the microsystem platform and integrated circuits. A fabrication run of preliminary test-devices of MMIC-to-waveguide transitions was carried out along with characterization during spring 2016. Fabrication work of the major concepts on prototype deliverables is scheduled to start with the beginning of the second period. The M3TERA consortium has participated in a large number of dissemination events, including ESSCIRC 2015, ISSCC 2016, GeMiC 2016, IEEE DML, IEEE IMS 2016, MEMSWAVE 2016.

Progress beyond the state of the art and expected potential impact (including the socio-economic impact and the wider societal implications of the project so far)

The concepts of a microsystem technology platform for THz systems developed in M3TERA clearly go beyond the state of the art, including micro-electromechanical reconfigurable sub-systems. A major step beyond state of the art is also the interfaces between active circuits and the waveguides developed in this project, which is a bottleneck for any MMIC integration into a THz waveguide system.
In summary, the main impact of the disruptive THz technology developed in M3TERA is still given as follows: highly-miniaturized, volume-manufacturable, low cost (as compared to state-of-the-art THz technology), low-weight, highly integrated THz with high product uniformity, enabling the large-scale exploitation of the THz frequency spectrum and thus a wide-spread use of THz technology in many applications in society, which is not possible by current expensive THz technology which is limited to high-end scientific and security applications.

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