Community Research and Development Information Service - CORDIS

FP5

LAPLADIS Report Summary

Project ID: G5RD-CT-2001-03004
Funded under: FP5-GROWTH
Country: Germany

Welding technology for a large area etching electrode consisting of aluminium

The electrode body consists of massive Aluminium with integrated cooling channels. Requirements for leak tightness and warpness of surface led to decision that necessary performance / reliability can be performed only by welding. At project begin no experience in welding Aluminium components in this mechanical dimension was available. Detailed investigations were made especially to the welding process and design rules for preparation of the components before welding and the aspect of final mechanical treatment. The results of this investigation enable FHR to produce vacuum components of Aluminium for applications in the field of etching, PVD and CVD.

Contact

Wolfgang HENTSCH, (Technical manager)
Tel.: +352-0552011
Fax: +352-0552040
E-mail
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