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FP5

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Project ID: G5RD-CT-2001-03004
Finanziato nell'ambito di: FP5-GROWTH
Paese: Germany

Welding technology for a large area etching electrode consisting of aluminium

The electrode body consists of massive Aluminium with integrated cooling channels. Requirements for leak tightness and warpness of surface led to decision that necessary performance / reliability can be performed only by welding. At project begin no experience in welding Aluminium components in this mechanical dimension was available. Detailed investigations were made especially to the welding process and design rules for preparation of the components before welding and the aspect of final mechanical treatment. The results of this investigation enable FHR to produce vacuum components of Aluminium for applications in the field of etching, PVD and CVD.

Reported by

FHR - Fendler, Hentsch, Raensch Anlagenbau GMBH
Am Huegel 2
01458 Ottendorf - Okrilla
Germany
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