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FP5

EURONIM Sintesi della relazione

Project ID: G5RD-CT-2001-00470
Finanziato nell'ambito di: FP5-GROWTH
Paese: France

Standard GaN/sapphire template (NID, n-type and semi-insulating), TDs~mid108cm{-2}

GaN/sapphire templates with TDs density in the mid 108cm{-2} are currently available. These are produce using the proprietary Si/N treatment of the sapphire substrate prior to the depososition of the low temperature buffer layer. These are pseudosubstrate used for the growth of nitride based device structure, mainly in MBE where the current status of the technology does not allow fabricating low dislocation density templates.

Reported by

Lumilog
2720, chemin de Saint Bernard, Les Moulins I
06220 Vallauris
France