Servizio Comunitario di Informazione in materia di Ricerca e Sviluppo - CORDIS


TREASURE Sintesi della relazione

Project ID: ENK6-CT-2002-00677
Finanziato nell'ambito di: FP5-EESD
Paese: Germany

High throughput reactor for up to 0,5 square meter LPE layers per run

In principle a vertical batch apparatus can be scaled up to 300 wafers (125mmx125mm), which are dipped into a solvent filling up a crucible of 1m height. As much as 10 such vertical systems could be placed next to each other into a furnace of two square meter in size.

We give one example under the following assumptions:
10 x 300Wafers / run with a circle time of 6 hours per run including loading and melt back would result in 8 layers / minute or 6 MW / year respectively. The cost per layer is then calculated to be less than 10 US cent. The energy consumed would be 20Wh / layer, which corresponds to an energy payback time of two or three days.

Informazioni correlate


Peter KRISTIAN, (Group leader)
Tel.: +49-753-1882080
Fax: +49-753-1883895