Servizio Comunitario di Informazione in materia di Ricerca e Sviluppo - CORDIS


NANOMASS II Sintesi della relazione

Project ID: IST-2001-33068
Finanziato nell'ambito di: FP5-IST
Paese: Denmark

Functional evaluation in a controlled ambient chamber: Methodology and Set-up

A measurement set-up has been designed and assembled for characterization of MEMS/NEMS devices. Simultaneous optical and electrical read-out can be achieved on MEMS/NEMS devices.

In the designed chamber the pressure can be controlled between 0.01 mbar-1 atm, also the temperature can be controlled. Moreover, it is possible to insert different gases under controlled flow rates, and/or molecules in liquid or in gas phase.

This is a vital requirement for fictionalisation of fragile NEMS devices or for more complex characterization biosensor applications. The developed system has attracted interest from biosensor researchers and could possible be commercialised.

Informazioni correlate


Anja BOISEN, (Section Leader and Group Leader)
Tel.: +45-452-55727
Fax: +45-458-87762