Servicio de Información Comunitario sobre Investigación y Desarrollo - CORDIS

FP5

NANOMAG Informe resumido

Project ID: G1RD-CT-2002-00692
Financiado con arreglo a: FP5-GROWTH
País: Italy

Method for sampling and analysis of exhaust gas

In order to characterize the chemical composition of the exhaust gas of a plasma process performed in organosilicon plasmas within the project it has been studied and optimized a sampling and analysis procedure, which allow the identification and quantification of unreacted monomer as well as of plasma by-products. Sampling is performed with a LN2 cold trap, while the analysis is performed by means of Gas Chromatography with mass spectrometric detection.

Contacto

Francesco FRACASSI
Tel.: +39-080-5442009
Fax: +39-080-5443405
Correo electrónico
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