Forschungs- & Entwicklungsinformationsdienst der Gemeinschaft - CORDIS

FP5

NANOPHOS Berichtzusammenfassung

Project ID: IST-2001-39112
Gefördert unter: FP5-IST
Land: Romania

Butane sensitive elements based on the light waveguide propagation into a thin or periodically structured ZnO film

Butane sensitive elements based on the light waveguide propagation into a thin or periodically structured ZnO films have been produced and tested. High optical quality c-axis oriented ZnO thin films have been grown by pulsed laser deposition on quartz (amorphous or 001) substrates using an excimer XeCl* laser source (308 nm, 20 ns, 2 Hz), operated at a laser fluence of 2 J/cm2 for a 4-cm target-substrate distance.

In case of the periodical structured configuration, a holographic grating (period 552 nm and depth h = 235 nm) was produced first on the amorphous quartz substrate by using HeCd laser in a standard holographic configuration and then the ZnO film was deposited. The depth of the groves decreases to about 90 nm, as the period of the grating remains unchanged.

A prism coupling or periodical structure was used in order to introduce the light into the planar ZnO waveguide and to ensure an optical detection mechanism. ZnO films are proven to be sensitive to butane (down to 100 ppm diluted in air or N2). The periodically structured ZnO waveguides are sensitive to butane (1000 ppm diluted in air).

Reported by

National Institute for Lasers, Plasma and Radiation Physics
National Institute for Lasers, Plasma and Radiation Physics
77125 Bucharest-Magurele
Romania
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