Start date: 2015-04-01, End date: 2018-03-31
The SeNaTe project is the next in a chain of thematically connected ENIAC JU KET pilot line projects which are associated with 450mm/300mm development for the 12nm and 10nm technology nodes. The main objective is the demonstration of the 7nm IC technology integration in line...
Record Number: 198669
Last updated on: 2017-04-12