Community Research and Development Information Service - CORDIS

RTD system: Plasma assisted vapour deposition

The Commission of the European Communities, Joint Research Centre, issues a restricted procedure call for the delivery of a state of the art research and development facility for plasma assisted chemical vapour deposition under microwave power.

The system should include: A cold wall with viewports; substrate RF bias voltage; microwave power supply; the possibility of working in electron cyclotron resonance mode; additional radiation heating of the parts; temperature controller; pumping system; gas supply system; programmable process control unit with data acquisition; all necessary safety installation.

Tenders will be invited from preselected organizations in accordance with the financial regulations of the European Communities (OJ No L 356 of 31.12.1977). Candidates should submit evidence that they are not in a state of bankruptcy or liquidation or that their activities have not been stopped, etc. In addition they should verifiable references showing their capability to implement the order.

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