Objective
The rapid development of microtechnology within the last decade shows that micro fabrication techniques are just about to enter the market phase. This means for equipment manufacturers that a new market for professional apparatus is emerging.
Electrochemical processes are of special interest in microtechnology, both the electrochemical deposition and electrochemical polishing and etching. The microelectroforming, i.e. high precision electrochemical deposition of metal and metal alloys into microstructures, is one of the essential processes of the LIGA-technique. The etching process for example is relevant for microstructuring of silicon. The electrochemical polishing is used to smoothen surfaces of microstructures.
The equipment used up to now comes from standard industrialapplications, using relatively large amounts of process media in open containers. These apparatuses are not adapted for high precision microfabrication in cleanrooms and do not fulfill the increasing requirements concerning environmental protection. In the proposed project the problems and requirements for electroforming and etching in microtechnology will be examined and a new concept of a self-contained and modularly designed machine will be developed to overcome the existing problems of these processes. Additionally the process parameters have to be optimized.
Fields of science (EuroSciVoc)
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
- natural sciences chemical sciences inorganic chemistry metalloids
- engineering and technology other engineering and technologies microtechnology
You need to log in or register to use this function
Programme(s)
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Topic(s)
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Call for proposal
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
Data not available
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
Funding Scheme
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Data not available
Coordinator
67346 Speyer, Rheinland-Pfalz
Germany
The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.