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Universal SEM as a multi-nano-analytical tool

Objective

The current scientific interest and next generation of nanotechnology-based products is combining converging fields and dealing with a large complexity (e.g. organic electronics, nanomedicine). We can see growing needs to visualize, manipulate, modify and characterize nano-objects in a single tool.

The aim of the UnivSEM project is to develop a novel multimodal tool combining
- a vision capability by integrating scanning electron (SEM), scanning probe (SPM) and optical microscopy (OM) thus enabling multimodal microscopy,
- a chemical analysis capability by time-of-flight secondary ion mass spectroscopy (TOF-SIMS) and energy dispersive X-ray (EDX),
- structural characterization by electron backscattered diffraction (EBSD),
- a non-destructive optical analysis capability by confocal Raman spectroscopy and cathodoluminescence (CL),
- a tomography capability by complementary use of novel 3D orthogonal TOF-SIMS, 3D EBSD and 3D confocal Raman tomography (the last method being non-destructive) thus enabling correlation between alternative 3D methods.

The proper resolution will be ensured by SEM column improvements, a new SPM design and OM type of Raman microscopy in SEM. Implementation of nano-scale 3D imaging, manipulation and non-destructive optical analysis in one universal instrument will represent a real breakthrough allowing simple operations or analyses in nanotechnology that are problematic or impossible nowadays.

The fully functional prototype of the new tool will demonstrate its unique modularity, resolution, data acquisition and simplification of working environment. Direct application of this multimodal tool is expected in many industrial quality controls and in R&D sectors (e.g. photovoltaics, plasmonics and cell-nanoparticle interaction).

Call for proposal

FP7-NMP-2011-SME-5
See other projects for this call

Coordinator

TESCAN BRNO SRO
Address
Libusina Trida 816/1 816
623 00 Brno Kohoutovice
Czechia
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
EU contribution
€ 499 649,60
Administrative Contact
Zora Strelcova (Ms.)

Participants (8)

EIDGENOSSISCHE MATERIALPRUFUNGS- UND FORSCHUNGSANSTALT
Switzerland
EU contribution
€ 372 300,80
Address
Ueberlandstrasse 129
8600 Dubendorf
Activity type
Higher or Secondary Education Establishments
Administrative Contact
Johann Michler (Dr.)
MAX-PLANCK-GESELLSCHAFT ZUR FORDERUNG DER WISSENSCHAFTEN EV
Germany
EU contribution
€ 381 695,40
Address
Hofgartenstrasse 8
80539 Munchen
Activity type
Research Organisations
Administrative Contact
Sabine Koenig (Dr.)
TOFWERK AG
Switzerland
EU contribution
€ 429 540
Address
Uttingenstrasse 22
3600 Thun
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Fuhrer Katrin (Ms.)
SPECS GMBH
Germany
EU contribution
€ 554 580
Address
Voltastrasse 5
13355 Berlin
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Oliver Schaff (Dr.)
VYSOKE UCENI TECHNICKE V BRNE
Czechia
EU contribution
€ 244 860,40
Address
Antoninska 548/1
601 90 Brno Stred
Activity type
Higher or Secondary Education Establishments
Administrative Contact
Tomáš šikola (Prof.)
WITEC WISSENSCHAFTLICHE INSTRUMENTEUND TECHNOLOGIE GMBH
Germany
EU contribution
€ 526 980
Address
Lise Meitner Strasse 6
89081 Ulm
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Olaf Hollricher (Dr.)
AMIRES SARL
Switzerland
EU contribution
€ 110 716,80
Address
Rue De La Serre 4
2000 Neuchatel
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Rudolf Frycek (Dr.)
TESCAN AS

Participation ended

Czechia
EU contribution
€ 476 330
Address
Libusina Tr 21
62300 Brno
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Jaroslav Jiruse (Dr.)