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MultidomaiN plAtform for iNtegrated MOre-tHan-MoorE/Beyond CMOS systems charActerisation & diagnosTics

Project description

Very advanced nanoelectronic components: design, engineering, technology and manufacturability Develop, deliver and validate a miniaturized and integrated platform for advanced thermal, electrical and chemical analysis at the nanoscale.

The principle goal of the NANOHEAT project is to develop, deliver and validate a miniaturized and integrated platform which provides a multidimensional nanoprobing platform for advanced thermal analysis at the nanoscale. For advanced nano-devices or Beyond-CMOS structures (sub-40nm transistors, SETs, graphene structures etc.) there is a deep shortage of versatile, multidomain tools capable of analysing phenomena occurring at a nanoscale. The family of AFM-based techniques provides various nanoscale observation capabilities restricted however to dedicated, particular phenomena. Moreover, available AFM systems do not allow for easy "domain-mixing" as well as for combination of large distance and nanoscale positioning precision. These techniques are not useful as in-line monitoring tools. The multi-functional system of independently controlled AFM-based nanoprobes, equipped with dedicated (FIB functionalized) tips and actuators that is developed within the NANOHEAT project, will allow for multi-domain diagnostics of nanoelectronic, nanophotonic and bio-electronic devices. The proposed system will allow to observe thermal, electrical (e.g. potential) or even chemical (e.g. electrochemical) properties at the nanoscale. It will also have in-line (on wafer) diagnostics capabilities. The consortium is composed of three R&D institutes, four university teams and two SMEs providing a mixture of a complementary expertise related to micro-engineering, design and technology of micro/nano-devices and systems, design and manufacturing of measurement and control electronics, modelling and simulation, material science and physics. Besides, four partners have expertise and potential required for validation of the developed system for specific applications. In addition the coordinator of the project, ITE is a leading Polish research centre active in the micro/nanoelectronic, micro/nano-system and photonic domains.

Call for proposal

FP7-ICT-2011-8
See other projects for this call

Funding Scheme

CP - Collaborative project (generic)

Coordinator

SIEC BADAWCZA LUKASIEWICZ - INSTYTUT TECHNOLOGII ELEKTRONOWEY
Address
Ulica Aleja Lotnikow 32-46
02668 Warszawa
Poland
Activity type
Research Organisations
EU contribution
€ 559 000
Administrative Contact
Alina Kalicińska (Mrs.)

Participants (10)

ECOLE POLYTECHNIQUE FEDERALE DE LAUSANNE
Switzerland
EU contribution
€ 443 233
Address
Batiment Ce 3316 Station 1
1015 Lausanne
Activity type
Higher or Secondary Education Establishments
Administrative Contact
Adrian Ionescu (Prof.)
IMINA TECHNOLOGIES SA
Switzerland
EU contribution
€ 417 400
Address
Epfl Quartier De L'innovation Batiment E
1015 Lausanne
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Guillaume Boetsch (Mr.)
IBM RESEARCH GMBH
Switzerland
EU contribution
€ 440 256
Address
Saeumerstrasse 4
8803 Rueschlikon
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Catherine Trachsel (Ms.)
CARL ZEISS SMS GMBH
Germany
EU contribution
€ 211 697
Address
Carl Zeiss Promenade 10
07745 Jena
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Klaus Edinger (Dr.)
FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
Germany
EU contribution
€ 507 172
Address
Hansastrasse 27C
80686 Munchen
Activity type
Research Organisations
Administrative Contact
Christoph Schulte (Mr.)
TECHNISCHE UNIVERSITAET ILMENAU
Germany
EU contribution
€ 660 880
Address
Ehrenbergstrasse 29
98693 Ilmenau
Activity type
Higher or Secondary Education Establishments
Administrative Contact
Thomas MIROW
UNIVERSITE DE FRANCHE-COMTE
France
EU contribution
€ 379 170
Address
1 Rue Claude Goudimel
25000 Besancon
Activity type
Higher or Secondary Education Establishments
Administrative Contact
Pauline Fournier (Ms.)
POLITECHNIKA WROCLAWSKA
Poland
EU contribution
€ 323 800
Address
Wybrzeze Wyspianskiego 27
50-370 Wroclaw
Activity type
Higher or Secondary Education Establishments
Administrative Contact
Teodor Gotszalk (Prof.)
CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE CNRS
France
EU contribution
€ 25 341
Address
Rue Michel Ange 3
75794 Paris
Activity type
Other
Administrative Contact
Nathalie APPEL (Ms.)
UNIVERSITE DE TECHNOLOGIE DE BELFORT - MONTBELIARD
France
EU contribution
€ 27 051
Address
Rue Du Chateau 10
90400 Sevenans
Activity type
Higher or Secondary Education Establishments
Administrative Contact
Arnaud MARCHANT (Mr.)