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Pre-standardisation of incremental FIB micro-milling for intrinsic stress evaluation at the sub-micron scale

Pre-standardisation of incremental FIB micro-milling for intrinsic stress evaluation at the sub-micron scale

Objective

"Intrinsic (or residual) stresses, resulting from manufacturing or processing steps, mostly define the performance and limit the lifetime of nanostructured materials, thin films, coatings and MEMS devices.
The established techniques for micron-scale measurement of residual stress still have strong limitations, e.g. in terms of spatial resolution, lack of depth sensing, their applicability on non-crystalline materials or accessibility to industry.
In this project, a European consortium is established to develop an innovative, highly reproducible and automated measurement protocol for the analysis of residual stress on a sub-micron scale, based on incremental focused ion beam (FIB) milling, along with high-resolution in situ Scanning Electron Microscopy (SEM) imaging and full field strain analysis by digital image correlation (DIC).
The activities will focus on the implementation and pre-standardisation of automated FIB-SEM, DIC and inverse stress calculation procedures, under official project liaisons with both CEN and VAMAS, together with the analysis and modelling of FIB induced artefacts and stress-structure-properties relationship for the selected materials and devices.
The final aim of the project will be the development of innovative design rules, implemented into simulation and optimization tools under coordination of industry partners, for the production of residual stress-controlled nanostructured materials, with specific focus on (i) multi-layered nano-coatings, (ii) micro/nano-crystalline and amorphous materials, (iii) MEMS and 3D metal interconnects.
The project is expected to realize a breakthrough in measurement, standardization and modelling ability of the residual stress distribution at the sub-micron scale.
The measurement techniques and the simulation tools will provide SMEs in particular with enabling technologies for the design and efficient production of innovative micro-devices with improved performance and substantially reduce development costs."
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Coordinator

UNIVERSITA DEGLI STUDI ROMA TRE

Address

Via Ostiense 159
00154 Roma

Italy

Activity type

Higher or Secondary Education Establishments

EU Contribution

€ 1 077 525,68

Administrative Contact

Marco Sebastiani (Dr.)

Participants (13)

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NPL MANAGEMENT LIMITED

United Kingdom

EU Contribution

€ 478 879

THE CHANCELLOR, MASTERS AND SCHOLARS OF THE UNIVERSITY OF OXFORD

United Kingdom

EU Contribution

€ 700 457,20

FRIEDRICH-ALEXANDER-UNIVERSITAET ERLANGEN NUERNBERG

Germany

EU Contribution

€ 511 450

MONTANUNIVERSITAET LEOBEN

Austria

EU Contribution

€ 549 812,50

FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.

Germany

EU Contribution

€ 1 236 120,62

EIDGENOESSISCHE TECHNISCHE HOCHSCHULE ZUERICH

Switzerland

EU Contribution

€ 213 480

UNIVERSITA DEGLI STUDI DI BRESCIA

Italy

EU Contribution

€ 197 390

ROBERT BOSCH GMBH

Germany

EU Contribution

€ 110 176

BERLINER NANOTEST UND DESIGN GMBH

Germany

EU Contribution

€ 165 150

TESCAN BRNO SRO

Czechia

EU Contribution

€ 355 327

TESCAN AS

Czechia

THALES SA

France

EU Contribution

€ 282 400

TECHNISCHE UNIVERSITAT DARMSTADT

Germany

EU Contribution

€ 257 700

Project information

Grant agreement ID: 604646

Status

Closed project

  • Start date

    1 January 2014

  • End date

    31 December 2016

Funded under:

FP7-NMP

  • Overall budget:

    € 8 615 106,78

  • EU contribution

    € 6 135 868

Coordinated by:

UNIVERSITA DEGLI STUDI ROMA TRE

Italy